Keywords
Vickers indenter
electron irradiation
contact pressure
elastic modulus
How to Cite
Abstract
Influence of electron irradiation on structural changes in the process of microindentation by the Vickers method in (111) oriented n-Si has been studied. It is shown, that electron irradiation with 1.1013 cm-2 fluence causes weak increase of elastic modulus and average contact pressure causing plastic deformation. In the area of unloading of the functional dependences of the indenter load-displacement, a plateau and a gradual change in the slope are simultaneously revealed. The mentioned changes are characteristic of partial amorphization and structural transformations in the metastable phases of silicon. Electron irradiation reveales a tendency to increase the critical pressures of phase transformations in the range of 4-5.5 GPa of average contact pressure.
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