KURASHVILI, Ia; MELASHVILI, Tatiana; GOGOLASHVILI, Nargiza; CHUBINIDZE, George; KADARIA, Marina; DAVID MKHEIDZE; GEORGE DARSAVELIDZE. Influence of mechanical polishing on the physical-mechanical properties of monocrystalline p-SiGe substrates. Georgian Scientists, [S. l.], v. 4, n. 1, p. 65–72, 2022. DOI: 10.52340/gs.2022.04.01.07. Disponível em: https://journals.4science.ge/index.php/GS/article/view/736. Acesso em: 2 may. 2024.